Plasma-resistant materials are an important component of many production processes and equipment in etching technology. To ensure high efficiency and long life, they must withstand various stresses, including chemical corrosion and high temperatures. This is where the plasma-resistant materials from Kyocera come into play.
High plasma resistance
Our plasma-resistant materials are characterised by their high resistance to plasma, which contributes to their long service life and reliable performance. These properties make them ideal for applications where there is a high demand.
Low dielectric loss
With our plasma-resistant materials characterised by low dielectric loss, the effective transfer of electrical charges is ensured, thereby enhancing the performance of the equipment
No metallic contamination
Our plasma-resistant materials do not cause metallic contamination, which is particularly important in etching technology.
Kyocera's plasma resistant materials show a high-quality, durable, and versatile solution for your etch technology production processes. We proudly offer our customers a wide range of solutions tailored to their individual needs and requirements. Whether yttria or alumina, together with you we will find the right material for your applications. With our plasma-resistant materials, you can be sure of a long-lasting, reliable, and efficient solution. Contact us today!