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Yttria (Y2O3) is a ceramic with excellent material properties suitable for numerous applications. Particularly noteworthy is the plasma resistance, which makes the material very suitable for applications in semiconductor processing plants where particle contamination must be avoided.

But yttria is not only an important material in the semiconductor industry. Thanks to its high thermal conductivity and temperature resistance, it is also popular in applications such as high-temperature furnace construction or in the production of thermal barrier coatings. In addition, yttria offers good corrosion resistance and is therefore also suitable for use in chemical plants.


The most important material properties of yttria in brief:

  • Excellent plasma resistance
  • High thermal conductivity and temperature resistance
  • Good corrosion resistance
  • High hardness
  • Good electrical insulation
  • High density

If you are interested in yttria products or need more information, please feel free to contact us. Our experienced experts can help you select the right material for your application.

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Material data sheets

Our yttria products